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请高手帮忙翻译,是半导体制造行业用橡胶件的技术文件
- A1 d D7 @ o( z Kalrez® 8002 is a clear, transparent product targeted specifically for select semiconductor plasma and gas deposition applications, i.e. etching, ashing, HDPCVD, PECVD, SACVD, etc. This unfilled product offers ultra-low particle generation in oxygen and fluorine-based plasmas versus mineral-filled products. Kalrez® 8002 exhibits excellent resistance to dry process chemistry, has good mechanical strength properties and is well suited for static, low stress/low sealing force and select bonded door seal applications. A maximum continuous service temperature of 275°C (527°F) is suggested. Ultrapure post cleaning and packaging is standard for parts made from Kalrez® 8002.6 n& T- i( t/ A2 F
Performance Features/Benefits
4 `7 E# N/ _" t• Ultra-low particle generation in oxygen and fluorine-based plasmas
. h4 s4 v$ b6 d0 y3 b; _2 j• Excellent (low) compression set properties, p( ~) L- {1 l
• Excellent thermal stability% H0 g( n" C0 F( r2 @1 ~' W
• Excellent resistance to dry process chemistry6 C. J; w. ~1 G* _- ]9 m+ ?
Suggested Applications' B- e4 D3 Q- M1 P) i2 E
• Gas inlet seals
! J/ J2 L! R, L8 c% S: I• Gas orifice seals
' W: a1 `1 B$ f ]• Gas feedthrough seals
6 t s: [$ e/ f• Select slit valve bonded door seals
7 }0 N1 Y6 R% k• Other static and low stress/low sealing force applications. D" [5 Q5 e6 u8 \1 x" U& k
Kalrez® 8002 has been reported to significantly improve wafer production in semiconductor HDPCVD, SACVD and PECVD applications where fluorinated plasmas, i.e., NF3, C3F8, etc. are used during the cleaning cycle. In a number of evaluations at fabline customers, Kalrez 8002 exhibited improved crack resistance, lower particle generation and longer seal life compared to competitive perfluoroelastomers in both static and dynamic sealing applications. |
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